Laser lithography of nanostructures

We have two directions in nanofabrication - two-photon nanolithography and laser interference lithography.

Two-photon photolithography

Two-photon polymerization lithography (2PP) is a unique method of laser structuring. It is based on non-linear absorption in focal volume and allows high resolution in three dimensions. This lithographic method guarantees precise control of geometrical shape of manufactured structures which makes it an excellent candidate for the fabrication of various photonic structures. 


Laser interference lithography

In this maskless lithography technique, the standing wave pattern that exists at the intersection of two coherent laser beams is used to expose a photosensitive layer.




  1. A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev
    "Polymer X-ray refractive nano-lenses fabricated by additive technology"

    Optics Express

  2. Ksenia A. Abrashitova, Dmitry N. Gulkin, Kirill R. Safronov, Natalia G. Kokareva, Ilya M. Antropov, Vladimir O. Bessonov, and Andrey A. Fedyanin
    "Bloch Surface Wave Photonic Device Fabricated by Femtosecond Laser Polymerisation Technique"

    Applied Sciences

  3. Boris I. Afinogenov, Daria S. Kopylova, Ksenia A. Abrashitova, Vladimir O. Bessonov, Anton S. Anisimov, Sergey A. Dyakov, Nikolay A. Gippius, Yuri G. Gladush, Andrey A. Fedyanin, and Albert G. Nasibulin
    "Midinfrared Surface Plasmons in Carbon Nanotube Plasmonic Metasurface"

    Physical Review Applied

  4. Denis M. Zhigunov, Daniil A. Shilkin, Natalia G. Kokareva, Vladimir O. Bessonov, Sergey A. Dyakov, Dmitry A. Chermoshentsev, Aram A. Mkrtchyan, Yury G. Gladush, Andrey A. Fedyanin and Albert G. Nasibulin
    "Single-walled carbon nanotube membranes as non-reflective substrates for nanophotonic applications"



Conference abstracts

  1. Ksenia A. Abrashitova, Dmitry N. Gulkin, Natalia G. Kokareva, Kirill R. Safronov, Artem S. Chizhov, Alexander A. Ezhov, Vladimir O. Bessonov and Andrey A. Fedyanin
    "Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices"

    SPIE Photonics West

    Proc. of SPIE Vol. 10115 1011510-1
  2. Kirill R. Safronov, Natalia G. Kokareva, Ksenia A. Abrashitova, Dmitry N. Gulkin, Vladimir O. Bessonov, Andrey A. Fedyanin
    "Planar elements of photonics for controlling Bloch surface waves in one-dimensional photonic crystal"

    Days on Diffraction

  3. Natalia Kokareva, Kirill Safronov, Dmitry Gulkin, Ksenia Abrashitova, Vladimir Bessonov, Andrey Fedyanin
    "Fabrication of planar optical waveguides by two-photon lithography to control Bloch surface waves in photonics crystals"

    Open Readings, Vilnius, Lithuania

  4. Gulkin D.N., Abrashitova K.A., Safronov K.R., Kokareva N.G., Antropov I.M., Bessonov V.O. and Fedyanin A.A.
    "Bloch-surface-waves based photonic devices studied by leakage radiation microscopy"

    Proceedings of International Conference on Metamaterials and Nanophotonics (METANANO-2017)

    AIP Conf. Proc. 1874, 030016-1–030016-3